Manufacturing tolerant topology optimization was researched by Ole Sigmund (link). Especially MEMS manufacturing techniques are considered like i.e. etching, e-beam lithography and laser machining.
Over-etched and under etched structures were demonstrated by eroded and dilated structures. Then sensitivity analysis was done for those cases and it is by some means accounted in the optimization process. It is reported that the results are satisfactory despite not being tweaked for best results yet.
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