Manufacturing tolerant topology optimization was researched by Ole Sigmund (link). Especially MEMS manufacturing techniques are considered like i.e. etching, e-beam lithography and laser machining.
Over-etched and under etched structures were demonstrated by eroded and dilated structures. Then sensitivity analysis was done for those cases and it is by some means accounted in the optimization process. It is reported that the results are satisfactory despite not being tweaked for best results yet.
It is always rare to find advised people on this topic, however you be understood as you no doubt know what you are talking about! Appreciate it